Accurate reduced-order modeling of MEMS and NEMS microactuators under dynamic electrostatic loading and large strokes.
| Autor: | Ben Sassi, Sarah, Najar, Fehmi |
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| Zdroj: | 2015 IEEE 12th International Multi-Conference on Systems, Signals & Devices (SSD15); 2015, p1-5, 5p |
| Databáze: | Complementary Index |
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