The study of the anomalous thermomechanical effect of fluorine-doped silicon dioxide (FSG) films using temperature dependent FTIR measurements.
| Autor: | Knapp, Matthias, Jager, Philipp, Ruile, Werner, Honal, Matthias, Bleyl, Ingo, Reindl, Leonhard M. |
|---|---|
| Zdroj: | 2015 IEEE International Ultrasonics Symposium (IUS); 2015, p1-4, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|