Simple test vehicle for metal fill and resistance of sub-8nm nanowire.
| Autor: | Sung, Seung Hoon, Chawla, Jasmeet, Carver, Colin, Chebiam, Ramanan, Clarke, James, Jezewski, Chris, Tronic, Tristan, Turkot, Bob, Yoo, Hui Jae |
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| Zdroj: | 2015 IEEE International Interconnect Technology Conference & 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM); 2015, p87-90, 4p |
| Databáze: | Complementary Index |
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