H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks.
| Autor: | Ghidini, Gabriella, Merlini, Daniele, Cannavo, Massimiliano, Polignano, Maria Luisa, Mica, Isabella, Galbiati, Amos, Zullino, Lucia, Turconi, Riccardo, Grasso, Salvatore, Moroni, Maurizio, Codegoni, Davide |
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| Zdroj: | 2015 45th European Solid State Device Research Conference (ESSDERC); 2015, p294-297, 4p |
| Databáze: | Complementary Index |
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