Closed-Loop Autofocus Scheme for Scanning Electron Microscope.
Autor: | Le Cui, Marturi, Naresh, Marchand, Eric, Dembélé, Sounkalo, Piat, Nadine |
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Zdroj: | MATEC Web of Conferences; 2015, Vol. 32, p1-6, 6p |
Databáze: | Complementary Index |
Externí odkaz: |