Effect of stress on a bimorph piezoelectric micromachined ultrasound transducer.
| Autor: | Haw, Marvin Tan Xing, Lou, Liang, Gu, Yuandong Alex |
|---|---|
| Zdroj: | 2015 International Conference on Optical MEMS & Nanophotonics (OMN); 2015, p752-755, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|