The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors.
| Autor: | I Shanenkov, A Sivkov, A Ivashutenko, Yu Shanenkova |
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| Zdroj: | IOP Conference Series: Materials Science & Engineering; Oct2015, Vol. 93 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
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