Versatile CMOS-MEMS integrated piezoelectric platform.
| Autor: | Tsai, J.M., Daneman, M., Boser, B., Horsley, D., Rais-Zadeh, M., Tang, H.Y., Lu, Y., Rozen, O., Liu, F., Lim, M., Assaderaghi, F. |
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| Zdroj: | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p2248-2251, 4p |
| Databáze: | Complementary Index |
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