Performance and noise analysis of capacitive silicon microphones using tailored system-level simulation.
| Autor: | Kuenzig, T., Schrag, G., Dehe, A., Wachutka, G. |
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| Zdroj: | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p2192-2195, 4p |
| Databáze: | Complementary Index |
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