Tunable multisegment SixNy/AlN piezo lenses for wavefront correction.
| Autor: | Zuerbig, V., Patz, D., Fries, J., Bichra, M., Pletschen, W., Holc, K., Reusch, M., Nebel, C. E., Sinzinger, S., Ambacher, O., Lebedev, V. |
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| Zdroj: | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p2045-2048, 4p |
| Databáze: | Complementary Index |
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