Rapid prototyping of piezoresistive MEMS sensors via a single-step laser carbonization and micromachining process.
| Autor: | Hughes, Z.B., Rahimi, R., Ochoa, M., Ziaie, B. |
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| Zdroj: | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p1287-1290, 4p |
| Databáze: | Complementary Index |
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