Piezoelectric micromachined ultrasonic transducer with increased output pressure via concentric venting rings.

Autor: Rozen, Ofer, Block, Scott. T., Shelton, Stefon E., Horsley, David A.
Zdroj: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p670-673, 4p
Databáze: Complementary Index