Magnetic thin films deposition using DC grid-attached magnetron.
| Autor: | Shandrikov, Maxim V., Vizir, Alexey V., Savkin, Konstantin P., Oks, Efim M., Tuynkov, Andrey V. |
|---|---|
| Zdroj: | 2015 IEEE International Conference on Plasma Sciences (ICOPS); 2015, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|