| Autor: |
Silverstein, Michael S., Bauer, Barry J., Hae-Jeong Lee, Barry J., Hedden, Ronald C., Landes, Brian, Lyons, John, Kern, Brandon, Niu, Jason, Kalantar, Tom |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 2003, Vol. 683 Issue 1, p572-575, 4p |
| Abstrakt: |
Specular x-ray reflectivity and small angle neutron scattering were used to characterize changes in the porosity, pore size and pore size distribution on processing a polymeric low-k material filled with 21.6 volume percent of a deuterated porogen with an average radius of 56 Å. Processing yielded a decrease in porosity to about 11 %, an increase in average pore radius to 83 Å, and a narrower pore size distribution. A sample with an unusual pore structure could be easily identified. © 2003 American Institute of Physics [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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