Hammer test to detect BEOL process marginalities on via chains in advanced nodes.
| Autor: | Mahalingam, Anbu Selvam KM, Silvestre, Mary Claire, Ramanathan, Eswar, Ordonio, Christopher, Schaller, John |
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| Zdroj: | 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2015, p408-410, 3p |
| Databáze: | Complementary Index |
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