Critical sensitivity of flash gate dimension spread on electrical performances for advanced embedded memory.
| Autor: | Agharben, El Amine, Roussy, A., Bocquet, M., Bileci, M., Begouin, S., Marchadier, A. |
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| Zdroj: | 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2015, p401-404, 4p |
| Databáze: | Complementary Index |
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