Electro-less barrier/seed formation in high aspect ratio via.
| Autor: | Tanaka, Takashi, Iwashita, Mitsuaki, Toshima, Takayuki, Fujita, Keiichi, Chen, James |
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| Zdroj: | 2015 IEEE 65th Electronic Components & Technology Conference (ECTC); 2015, p78-82, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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