Methodology to achieve planar technology-like ESD performance in FINFET process.
| Autor: | Lee, Jian-Hsing, Prabhu, Manjunatha, Korablev, Konstantin, Singh, Jagar, Natarajan, Mahadeva Iyer, Pandey, Shesh Mani |
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| Zdroj: | 2015 IEEE International Reliability Physics Symposium; 2015, p00-3F.3.6, 0p |
| Databáze: | Complementary Index |
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