Fracture mechanics of thin film systems on the sub-micron scale.
| Autor: | Kozic, Darjan, Treml, Ruth, Schongrundner, Ronald, Brunner, Roland, Kiener, Daniel, Zechner, Johannes, Antretter, Thomas, Ganser, Hans-Peter |
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| Zdroj: | 2015 16th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems; 2015, p1-5, 5p |
| Databáze: | Complementary Index |
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