Effects of the trapping dust particles on the sheath structure in radio-frequency discharges.

Autor: Wang, Dezhen, Sheng, Mingyu
Předmět:
Zdroj: Journal of Applied Physics; 8/1/2003, Vol. 94 Issue 3, p1368, 6p, 9 Graphs
Abstrakt: The spatial distributions of the trapping dust particles under the interaction of the electrostatic, gravitational, ion-drag, and pressure gradient forces in a radio-frequency sheath are investigated with a self-consistent model. The effects of the trapping dust particles on the ion flux, ion mean velocity, ion and time-averaged electron densities, and time-averaged local potential in the sheath are studied in detail. The distribution for the particles with a finite temperature has a thermal broadening. The region where dust particles trapped is wider for a higher dust temperature or a smaller particulate radius. Due to the collection and scattering of ions by dust particles, the ion flux in the sheath with dust suspending is not constant but decreased. The ion and time-averaged electron densities in the region of trapping particles are also decreased. The time-averaged local sheath potential in the region of the trapping dust particles is even more negative and the local ion mean velocity is increased, which are qualitatively consistent with the experimental measurements of Arnas et al. [Phys. Plasmas 7, 4418 (2000)]. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index