Effects of Propane/Nitrogen Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films.
| Autor: | Liang-Hsun Lai, Shao-En Chiou, Hsiang-Chun Hsueh, Sham-Tsong Shiue |
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| Zdroj: | ECS Journal of Solid State Science & Technology; 2013, Vol. 2 Issue 11, pM44-M51, 8p |
| Databáze: | Complementary Index |
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