Influence of nitrogen trap states on the electronic properties of high-k metal gate transistors.
Autor: | Ocker, J., Kupke, S., Slesazeck, S., Mikolajick, T., Erben, E., Drescher, M., Naumann, A., Lazarevic, F., Leitsmann, R. |
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Zdroj: | 2014 IEEE International Integrated Reliability Workshop Final Report (IIRW); 2014, p86-89, 4p |
Databáze: | Complementary Index |
Externí odkaz: |