Influence of nitrogen trap states on the electronic properties of high-k metal gate transistors.

Autor: Ocker, J., Kupke, S., Slesazeck, S., Mikolajick, T., Erben, E., Drescher, M., Naumann, A., Lazarevic, F., Leitsmann, R.
Zdroj: 2014 IEEE International Integrated Reliability Workshop Final Report (IIRW); 2014, p86-89, 4p
Databáze: Complementary Index