NEMS by multilayer sidewall transfer lithography.
| Autor: | Liu, Dixi, Syms, Richard R.A., Ahmad, Munir M. |
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| Zdroj: | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 2015, p288-291, 4p |
| Databáze: | Complementary Index |
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