Dynamically-balanced folded-beam suspensions.
| Autor: | Shmulevich, Shai, Hotzen, Inbar, Elata, David |
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| Zdroj: | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 2015, p215-218, 4p |
| Databáze: | Complementary Index |
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