Differential micro-Pirani gauge for monitoring MEMS wafer-level package.
| Autor: | Chen, Yang-Che, Lin, Wei-Chu, Wang, Hung-Sen, Fan, Chen-Chih, Lin, Keaton C.-H., Chou, Bruce C.S., Liu, Mingo C.-M. |
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| Zdroj: | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 2015, p89-92, 4p |
| Databáze: | Complementary Index |
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