A novel technique for fabrication of MEMS based capacitive pressure sensor using press-on-contact in anodic bonding.
| Autor: | Chandra, Sudhir, Tiwari, Ruchi, Parthiban, C. |
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| Zdroj: | 2014 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP); 2014, p1-5, 5p |
| Databáze: | Complementary Index |
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