Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline InxGayZnzO4 Films.
| Autor: | Bin Zhu, Lynch, David M., Chen-yang Chung, Ast, Dieter G., Greene, Raymond G., Thompson, Michael O. |
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| Zdroj: | ECS Journal of Solid State Science & Technology; 2015, Vol. 4 Issue 5, pQ43-Q45, 3p |
| Databáze: | Complementary Index |
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