Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model.
Autor: | Kabak, Kamil Erkan, Heavey, Cathal, Corbett, Vincent |
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Zdroj: | Proceedings of the 40th Conference Winter Simulation; 12/7/2008, p2185-2193, 9p |
Databáze: | Complementary Index |
Externí odkaz: |