| Autor: |
Liang-Wen Ji, Yu-Jen Hsiao, Sheng-Joue Young, Wei-Shun Shih, Water, Walter, Shiau-Mei Lin |
| Zdroj: |
IEEE Sensors Journal; Feb2015, Vol. 15 Issue 2, p762-765, 4p |
| Abstrakt: |
In this paper, the TiO2/Ag/TiO2 (TAT) multilayer thin films were deposited on a corning glass substrate at room temperature using radio frequency magnetron sputtering technique. The TAT multilayer was characterized by field-emission scanning microscope, atomic force microscopy, X-ray diffraction, and ultraviolet (UV)-visible spectroscopy. The TAT multilayer can be optimized to obtain a transmittance more than 80%. With a 360-nm illumination and 5 V applied bias, it was found that the fabricated UV photodetectors (PDs) with TAT structure showed much higher photoresponse (10 A/W) than traditional TiO2 metal-semiconductor-metal PDs (0.08 A/W). This indicated that the TAT multilayer structures have potential to be employed in the PD devices of high performance. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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