3M microreplicated TrizactTM pad conditioners for FEOL tungsten plug and metal gate applications.
| Autor: | Zabasajja, John, Sokol, Jennifer, Laraia, Vince, Fritz, Matthew, Xie, Junqing, Gould, Charles |
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| Zdroj: | Proceedings of International Conference on Planarization/CMP Technology 2014; 2014, p311-314, 4p |
| Databáze: | Complementary Index |
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