Dummy design characterization for STI CMP with fixed abrasive.
| Autor: | Tsvetanova, Diana, Devriendt, Katia, Ong, Patrick, Vandeweyer, Tom, Delande, Tinne, Chew, Soon Aik, Horiguchi, Naoto, Struyf, Herbert |
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| Zdroj: | Proceedings of International Conference on Planarization/CMP Technology 2014; 2014, p199-202, 4p |
| Databáze: | Complementary Index |
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