Tackling hillocks growth after aluminum CMP.
| Autor: | Muller, M. R., Kallis, K., Menzel, S., Kunzelmann, U., Petrov, I., Knoch, J. |
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| Zdroj: | Proceedings of International Conference on Planarization/CMP Technology 2014; 2014, p129-132, 4p |
| Databáze: | Complementary Index |
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