Electrostatic actuation of a silicon membrane to control the injected fluid volume by a micro pump.
| Autor: | Benmoussa, N., Guen, A., Bouazza, B., Otmani, R. |
|---|---|
| Zdroj: | 2014 North African Workshop on Dielectic Materials for Photovoltaic Systems (NAWDMPV); 2014, p1-4, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|