Germanium condensation for co-integration: strain study by dark-field electron holography.

Autor: Boureau, Victor, Benoit, Daniel, Warot, Benedicte, Hytch, Martin J., Claverie, Alain
Zdroj: 2014 IEEE 9th Nanotechnology Materials & Devices Conference (NMDC); 2014, p34-36, 3p
Databáze: Complementary Index