Improvement of the off-state breakdown voltage with field plate and low-density drain in AlGaN/GaN high-electron mobility transistors.

Autor: Peng Zhang, Sheng-Lei Zhao, Bin Hou, Chong Wang, Xue-Feng Zheng, Jin-Cheng Zhang, Yue Hao, Xiao-Hua Ma
Předmět:
Zdroj: Chinese Physics B; Mar2015, Vol. 24 Issue 3, p1-1, 1p
Abstrakt: We present an AlGaN/GaN high-electron mobility transistor (HEMT) device with both field plate (FP) and low-density drain (LDD). The LDD is realized by the injection of negatively charged fluorine (F) ions under low power in the space between the gate and the drain electrodes. With a small-size FP and a LDD length equal to only 31% of the gate-drain spacing, the device effectively modifies the electric field distribution and achieves a breakdown voltage enhancement up to two times when compared with a device with only FP. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index