| Autor: |
Sahu, B. B., Han, Jeon G., Kim, Hye R., Ishikawa, K., Hori, M. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 1/21/2015, Vol. 117 Issue 3, p033301-1-033301-9, 9p, 1 Diagram, 1 Chart, 5 Graphs |
| Abstrakt: |
This work report on the results obtained using the Langmuir probe (LP) measurements in high-power dc magnetron sputtering discharges. Data show clear evidence of two electron components, such as warm and bulk electrons, in the sputtering plasma in a magnetic trap. We have also used optical emission spectroscopy diagnostic method along with LP to investigate the plasma production. Data show that there is a presence of low-frequency oscillations in the 2-3MHz range, which are expected to be generated by high-frequency waves. Analysis also suggests that the warm electrons, in the plasmas, can be formed due to the collisionless Landau damping of the bulk electrons. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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