| Autor: |
Ishijima, Tatsuo, Nojiri, Yasunori, Toyoda, Hirotaka, Sugai, Hideo |
| Zdroj: |
Japanese Journal of Applied Physics; Aug2010, Vol. 49 Issue 8R, p1-1, 1p |
| Abstrakt: |
A vacuum-sealed antenna coupler was newly developed for excitation of meter-scale high-density surface wave plasma for manufacturing giant microelectronics devices such as liquid crystal displays and thin-film solar cells. To produce large-area uniform plasma, various multislot antenna designs at 2.45 GHz were investigated by slot antenna analysis and simulation using the finite difference time domain (FDTD) method. Optical emission images of the plasma observed using a wide-angle charge-coupled device (CCD) camera and Langmuir probe measurements revealed the production of a very uniform and high-density plasma of 1 m length and 0.3 m width whose dimensions can easily be expanded to a much larger scale. Furthermore, the production of a large-area sheetlike plasma of 2 cm thickness and 1 m length has been demonstrated to reduce the discharge power, heat load, gas consumption, and pumping load. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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