| Autor: |
Kengo Kobayashi, Shinya Hatakeyama, Tomohiro Yoshida, Yuhei Yabe, Daniel Piedra, Tomás Palacios, Taiichi Otsuji, Tetsuya Suemitsu |
| Zdroj: |
Applied Physics Express; Sep2014, Vol. 7 Issue 9, p1-1, 1p |
| Abstrakt: |
We experimentally demonstrate the efficacy of using slant field plates (field plates with the plate-to-channel gap gradually increasing away from the gate edge) on the breakdown voltage. We develop a new fabrication process using a multi-step SiCN film such that both slant and conventional field plates are fabricated simultaneously. Consequently, we fabricate 230-nm-gate AlGaN/GaN HEMTs with several types of field plates. The slant field plate increases the breakdown voltage by 66% more than that of the conventional field plate. The advantages of using slant field plates to increase the breakdown voltage are experimentally confirmed for the first time. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
