New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures.

Autor:	Pruchnik B; Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-370, Wrocław, Poland., Kwoka K; Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-370, Wrocław, Poland., Gacka E; Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-370, Wrocław, Poland., Badura D; Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-370, Wrocław, Poland., Kunicki P; Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-370, Wrocław, Poland., Sierakowski A; Institute of Microelectronics and Photonics, Łukasiewicz Research Network, Lotników 32/46, 02-668, Warsaw, Poland., Janus P; Institute of Microelectronics and Photonics, Łukasiewicz Research Network, Lotników 32/46, 02-668, Warsaw, Poland., Piasecki T; Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-370, Wrocław, Poland., Gotszalk T; Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-370, Wrocław, Poland.
Jazyk:	angličtina
Zdroj:	Beilstein journal of nanotechnology [Beilstein J Nanotechnol] 2024 Oct 23; Vol. 15, pp. 1273-1282. Date of Electronic Publication: 2024 Oct 23 (Print Publication: 2024).
DOI:	10.3762/bjnano.15.103
Abstrakt:	Focused electron beam-induced deposition (FEBID) is a novel technique for the development of multimaterial nanostructures. More importantly, it is applicable to the fabrication of free-standing nanostructures. Experimenting at the nanoscale requires instruments with sufficient resolution and sensitivity to measure various properties of nanostructures. Such measurements (regardless of the nature of the quantities being measured) are particularly problematic in the case of free-standing nanostructures, whose properties must be separated from the measurement system to avoid possible interference. In this paper, we propose novel devices, namely operational micro-electromechanical system (opMEMS) bridges. These are 3D substrates with nanometer-scale actuation capability and equipped with electrical contacts characterised by leakage resistances above 100 GΩ, which provide a platform for comprehensive measurements of properties (i.e., resistance) of free-standing FEBID structures. We also present a use case scenario in which an opMEMS bridge is used to measure the resistance of a free-standing FEBID nanostructure. (Copyright © 2024, Pruchnik et al.)
Databáze:	MEDLINE
Externí odkaz:	Zobrazit plný text záznamu