Investigating Gold Deposition with High-Power Impulse Magnetron Sputtering and Direct-Current Magnetron Sputtering on Polystyrene, Poly-4-vinylpyridine, and Polystyrene Sulfonic Acid.

Autor:	Bulut Y; Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, Hamburg 22607, Germany.; Department of Physics, Chair for Functional Materials, Technical University of Munich, TUM School of Natural Sciences, James-Franck-Str. 1, Garching 85748, Germany., Sochor B; Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, Hamburg 22607, Germany., Reck KA; Chair for Multicomponent Materials, Department for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, Kiel 24143, Germany., Schummer B; Fraunhofer Institute for Integrated Circuits IIS, Development Center for X-ray Technology EZRT, Flugplatzstr. 75, Fürth 90768, Germany., Meinhardt A; Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, Hamburg 22607, Germany.; Department of Physics, University of Hamburg, Notkestr. 9-11, Hamburg 22607, Germany., Drewes J; Chair for Multicomponent Materials, Department for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, Kiel 24143, Germany., Liang S; Department of Physics, Chair for Functional Materials, Technical University of Munich, TUM School of Natural Sciences, James-Franck-Str. 1, Garching 85748, Germany., Guan T; Department of Physics, Chair for Functional Materials, Technical University of Munich, TUM School of Natural Sciences, James-Franck-Str. 1, Garching 85748, Germany., Jeromin A; Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, Hamburg 22607, Germany., Stierle A; Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, Hamburg 22607, Germany.; Department of Physics, University of Hamburg, Notkestr. 9-11, Hamburg 22607, Germany., Keller TF; Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, Hamburg 22607, Germany.; Department of Physics, University of Hamburg, Notkestr. 9-11, Hamburg 22607, Germany., Strunskus T; Chair for Multicomponent Materials, Department for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, Kiel 24143, Germany., Faupel F; Chair for Multicomponent Materials, Department for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, Kiel 24143, Germany., Müller-Buschbaum P; Department of Physics, Chair for Functional Materials, Technical University of Munich, TUM School of Natural Sciences, James-Franck-Str. 1, Garching 85748, Germany.; Heinz Maier-Leibnitz Zentrum (MLZ), Technical University of Munich, Lichtenbergstraße 1, Garching 85748, Germany., Roth SV; Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, Hamburg 22607, Germany.; KTH Royal Institute of Technology, Teknikringen 56-58, Stockholm 100 44, Sweden.
Jazyk:	angličtina
Zdroj:	Langmuir : the ACS journal of surfaces and colloids [Langmuir] 2024 Oct 29; Vol. 40 (43), pp. 22591-22601. Date of Electronic Publication: 2024 Oct 14.
DOI:	10.1021/acs.langmuir.4c02344
Abstrakt:	Fabricating thin metal layers and particularly observing their formation process in situ is of fundamental interest to tailor the quality of such a layer on polymers for organic electronics. In particular, the process of high power impulse magnetron sputtering (HiPIMS) for establishing thin metal layers has sparsely been explored in situ. Hence, in this study, we investigate the growth of thin gold (Au) layers with HiPIMS and compare their growth with thin Au layers prepared by conventional direct current magnetron sputtering (dcMS). Au was chosen because it is an inert noble metal and has a high scattering length density. This allows us to track the growing nanostructures via grazing incidence scattering. In particular, Au deposition on the polymer polystyrene (PS) with the respective structural analogues poly-4-vinlypyridine (P4VP) and polystyrene sulfonic acid (PSS) is studied. Additionally, the nanostructured layers on these different polymer films are further probed by field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), X-ray reflectometry (XRR), and four-point probe measurements. We report that HiPIMS leads to smaller island-to-island distances throughout the whole sputter process. Moreover, an increased cluster density and an earlier percolation threshold are achieved compared to dcMS. Additionally, in the early stage, we observe a significant increase in coverage by HiPIMS, which is favorable for the improvement of the polymer-metal interface.
Databáze:	MEDLINE
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