Laser-patterned epoxy-based 3D microelectrode arrays for extracellular recording.

Autor:	Peng H; Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, 85748, Garching, Germany., Kopic I; Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, 85748, Garching, Germany., Potfode SR; Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, 85748, Garching, Germany., Teshima TF; Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, 85748, Garching, Germany.; Medical & Health Informatics Laboratories NTT Research Incorporated, 940 Stewart Dr, Sunnyvale, CA 94085, USA., Boustani GA; Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, 85748, Garching, Germany., Hiendlmeier L; Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, 85748, Garching, Germany., Wang C; Microrobotic Bioengineering Lab (MRBL), Department of Electrical Engineering, TUM School of Computation, Information, and Technology, Technical University of Munich, Hans-Piloty-Str. 1, Garching 85748, Germany., Hussain MZ; Chair of Inorganic and Metal-Organic Chemistry, School of Natural Sciences and Catalysis Research Centre, Department of Chemistry, Technical University of Munich, Lichtenbergstr. 4, 85748 Garching, Germany., Özkale B; Microrobotic Bioengineering Lab (MRBL), Department of Electrical Engineering, TUM School of Computation, Information, and Technology, Technical University of Munich, Hans-Piloty-Str. 1, Garching 85748, Germany., Fischer RA; Chair of Inorganic and Metal-Organic Chemistry, School of Natural Sciences and Catalysis Research Centre, Department of Chemistry, Technical University of Munich, Lichtenbergstr. 4, 85748 Garching, Germany., Wolfrum B; Neuroelectronics, Munich Institute of Biomedical Engineering, Department of Electrical Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Hans-Piloty-Str. 1, 85748, Garching, Germany.; Medical & Health Informatics Laboratories NTT Research Incorporated, 940 Stewart Dr, Sunnyvale, CA 94085, USA.
Jazyk:	angličtina
Zdroj:	Nanoscale [Nanoscale] 2024 Aug 07; Vol. 16 (30), pp. 14295-14301. Date of Electronic Publication: 2024 Aug 07.
DOI:	10.1039/d4nr01727g
Abstrakt:	Microelectrode arrays are commonly used to study the electrophysiological behavior of cells. Recently, there has been a growing interest in fabricating three-dimensional microelectrode arrays. Here, we present a novel process for the fast fabrication of epoxy-based 3D microelectrode array platforms with the assistance of laser-patterning technology. To this end, we photopatterned 3D pillars as scaffolds using epoxy-based dry films. Electrodes and conductor traces were fabricated by laser patterning of sputtered platinum films on top of the 3D structures, followed by deposition of parylene-C for insulation. Microelectrodes at the tip of the 3D structures were exposed using a vertical laser ablation process. The final electrodes demonstrated a low impedance of ∼10 kΩ at 1 kHz in electrochemical impedance spectroscopy measurements under physiological conditions. We investigated the maximum compression force of the 3D structures, which could withstand approximately 0.6 N per pillar. The 3D microelectrode arrays were used to record extracellular signals from HL-1 cells in culture as a proof of principle. Our results show regular firing of action potentials recorded at the tip of the 3D structures, demonstrating the possibility of recording cell signals in non-planar environments.
Databáze:	MEDLINE
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