Multispectral Holographic Intensity and Phase Imaging of Semitransparent Ultrathin Films.

Autor:	Haegele S; ICFO-Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, 08860 Barcelona, Spain., Martínez-Cercós D; ICFO-Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, 08860 Barcelona, Spain., Arrés Chillón J; ICFO-Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, 08860 Barcelona, Spain., Paulillo B; ICFO-Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, 08860 Barcelona, Spain., Terborg RA; ICFO-Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, 08860 Barcelona, Spain., Pruneri V; ICFO-Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, 08860 Barcelona, Spain.; ICREA-Institució Catalana de Recerca i Estudis Avançats, 08010 Barcelona, Spain.
Jazyk:	angličtina
Zdroj:	ACS photonics [ACS Photonics] 2024 Apr 30; Vol. 11 (5), pp. 1873-1886. Date of Electronic Publication: 2024 Apr 30 (Print Publication: 2024).
DOI:	10.1021/acsphotonics.3c01834
Abstrakt:	In this paper, we demonstrate a novel optical characterization method for ultrathin semitransparent and absorbing materials through multispectral intensity and phase imaging. The method is based on a lateral-shearing interferometric microscopy (LIM) technique, where phase-shifting allows extraction of both the intensity and the phase of transmitted optical fields. To demonstrate the performance in characterizing semitransparent thin films, we fabricated and measured cupric oxide (CuO) seeded gold ultrathin metal films (UTMFs) with mass-equivalent thicknesses from 2 to 27 nm on fused silica substrates. The optical properties were modeled using multilayer thin film interference and a parametric model of their complex refractive indices. The UTMF samples were imaged in the spectral range from 475 to 750 nm using the proposed LIM technique, and the model parameters were fitted to the measured data in order to determine the respective complex refractive indices for varying thicknesses. Overall, by using the combined intensity and phase not only for imaging and quality control but also for determining the material properties, such as complex refractive indices, this technique demonstrates a high potential for the characterization of the optical properties, of (semi-) transparent thin films. Competing Interests: The authors declare the following competing financial interest(s): R.T. and V.P. are coinventors of granted patent US 11686680 B2, while S.H., R.T. and V.P. of patent application EP23382669.2, both related to the paper. (© 2024 The Authors. Published by American Chemical Society.)
Databáze:	MEDLINE
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