| Autor: |
Chen F; Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. fu-der.chen@mpi-halle.mpg.de.; Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada., Sharma A; Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. fu-der.chen@mpi-halle.mpg.de.; Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada., Roszko DA; Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. fu-der.chen@mpi-halle.mpg.de.; Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada., Xue T; Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. fu-der.chen@mpi-halle.mpg.de.; Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada., Mu X; Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. fu-der.chen@mpi-halle.mpg.de.; Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada., Luo X; Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore., Chua H; Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore., Lo PG; Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore., Sacher WD; Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. fu-der.chen@mpi-halle.mpg.de., Poon JKS; Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany. fu-der.chen@mpi-halle.mpg.de.; Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada. |
| Abstrakt: |
Optical techniques, such as optogenetic stimulation and functional fluorescence imaging, have been revolutionary for neuroscience by enabling neural circuit analysis with cell-type specificity. To probe deep brain regions, implantable light sources are crucial. Silicon photonics, commonly used for data communications, shows great promise in creating implantable devices with complex optical systems in a compact form factor compatible with high volume manufacturing practices. This article reviews recent developments of wafer-scale multifunctional nanophotonic neural probes. The probes can be realized on 200 or 300 mm wafers in commercial foundries and integrate light emitters for photostimulation, microelectrodes for electrophysiological recording, and microfluidic channels for chemical delivery and sampling. By integrating active optical devices to the probes, denser emitter arrays, enhanced on-chip biosensing, and increased ease of use may be realized. Silicon photonics technology makes possible highly versatile implantable neural probes that can transform neuroscience experiments. |
