Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y 2 O 3 -Y 4 Al 2 O 9 composite under CF 4 /Ar/O 2 mixed gas conditions.

Autor: Ma HJ; Department of Engineering Ceramics, Korea Institute of Materials Science, Changwon, 51508, Republic of Korea. hojinma@kims.re.kr., Kim S; Semiconductor Integrated Metrology Team, Korea Research Institute of Standards and Science, Daejeon, 34113, Republic of Korea., Kim HN; Department of Engineering Ceramics, Korea Institute of Materials Science, Changwon, 51508, Republic of Korea., Kim MJ; Department of Engineering Ceramics, Korea Institute of Materials Science, Changwon, 51508, Republic of Korea., Ko JW; Department of Engineering Ceramics, Korea Institute of Materials Science, Changwon, 51508, Republic of Korea., Lee JW; Department of Engineering Ceramics, Korea Institute of Materials Science, Changwon, 51508, Republic of Korea., Kim JH; Semiconductor Integrated Metrology Team, Korea Research Institute of Standards and Science, Daejeon, 34113, Republic of Korea., Lee HC; Department of Semiconductor Science, Engineering and Technology, Korea Aerospace University, Goyang, 10540, Republic of Korea.; School of Electronics and Information Engineering, Korea Aerospace University, Goyang, 10540, Republic of Korea., Park YJ; Department of Engineering Ceramics, Korea Institute of Materials Science, Changwon, 51508, Republic of Korea. yjpark87@kims.re.kr.
Jazyk: angličtina
Zdroj: Scientific reports [Sci Rep] 2024 Mar 25; Vol. 14 (1), pp. 7008. Date of Electronic Publication: 2024 Mar 25.
DOI: 10.1038/s41598-024-57697-5
Abstrakt: In the semiconductor manufacturing process, when conducting inductively coupled plasma-reactive ion etching in challenging environments, both wafers and the ceramic components comprising the chamber's interior can be influenced by plasma attack. When ceramic components are exposed to long-term plasma environments, the eroded components must be replaced. Furthermore, non-volatile reactants can form and settle on semiconductor chips, acting as contaminants and reducing semiconductor production yield. Therefore, for semiconductor processing equipment parts to be utilized, it is necessary that they exhibit minimized generation of contaminant particles and not deviate significantly from the composition of conventionally used Al 2 O 3 and Y 2 O 3 ; part must also last long in various physicochemical etching environment. Herein, we investigate the plasma etching behavior of Y 2 O 3 -Y 4 Al 2 O 9 (YAM) composites with a variety of mixing ratios under different gas fraction conditions. The investigation revealed that the etching rates and changes in surface roughness for these materials were significantly less than those of Y 2 O 3 materials subjected to both chemical and physical etching. Microstructure analysis was conducted to demonstrate the minimization of crater formation. Mechanical properties of the composite were also analyzed. The results show that the composite can be commercialized as next-generation ceramic component in semiconductor processing equipment applications.
(© 2024. The Author(s).)
Databáze: MEDLINE
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