Enhancing the electric charge output in LiNbO 3 -based piezoelectric pressure sensors.

Autor: Xu W; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Geng W; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Zhang H; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Fu W; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Wang Z; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Li J; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Qiao X; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Zhang Y; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn., Chou X; Science and Technology on Electronic Test and Measurement Laboratory, North University of China Taiyuan 030051 China wenpinggeng@nuc.edu.cn.
Jazyk: angličtina
Zdroj: RSC advances [RSC Adv] 2024 Mar 11; Vol. 14 (12), pp. 8313-8321. Date of Electronic Publication: 2024 Mar 11 (Print Publication: 2024).
DOI: 10.1039/d3ra07712h
Abstrakt: Lithium niobate (LiNbO 3 ) single crystals are a kind of ferroelectric material with a high piezoelectric coefficient and Curie temperature, which is suitable for the preparation of piezoelectric pressure sensors. However, there is little research reporting on the use of LiNbO 3 single crystals to prepare piezoelectric pressure sensors. Therefore, in this paper, LiNbO 3 was used to prepare piezoelectric pressure sensors to study the feasibility of using LiNbO 3 single crystals as a sensitive material for piezoelectric pressure sensors. In addition, chemical mechanical polishing (CMP) technology was used to prepare LiNbO 3 crystals with different thicknesses to study the influence of these LiNbO 3 crystals on the electric charge output of the sensors. The results showed that the sensitivity of a 300 μm sample (0.218 mV kPa -1 ) was about 1.23 times that of a 500 μm sample (0.160 mV kPa -1 ). Low-temperature polymer heterogeneous integration and oxygen plasma activation technologies were used to realize the heterogeneous integration of LiNbO 3 and silicon to prepare piezoelectric pressure sensors, which could significantly improve the sensitivity of the sensor by approximately 16.06 times (2.569 mV kPa -1 ) that of the original sample (0.160 mV kPa -1 ) due to an appropriate residual stress that did not shatter LiNbO 3 or silicon, thus providing a possible method for integrating piezoelectric pressure sensors and integrated circuits.
Competing Interests: There are no conflicts to declare.
(This journal is © The Royal Society of Chemistry.)
Databáze: MEDLINE
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