Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting.

Autor: Anang FEB; Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany.; Scientific Metrology Department, Ghana Standards Authority, Accra P.O. Box MB 245, Ghana., Wei X; Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany., Xu J; Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany., Cain M; Electrosciences Ltd., Farnham, Surrey GU9 9QT, UK., Li Z; Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany., Brand U; Surface Metrology Department, Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany., Peiner E; Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany.
Jazyk: angličtina
Zdroj: Micromachines [Micromachines (Basel)] 2024 Feb 10; Vol. 15 (2). Date of Electronic Publication: 2024 Feb 10.
DOI: 10.3390/mi15020261
Abstrakt: In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modeling (FEM) of a single NW using COMSOL Multiphysics at an applied axial force of 0.9 nN, which corresponded to the experimental condition, resulted in a voltage potential of -6.5 mV. The process repeated with the same pattern design using a layer of SU-8 polymer on the NWs yielded a much higher maximum peak output voltage of ~21.6 mV and a corresponding peak power density of 0.22 µW/cm 3 , independent of the size of the NW array. The mean values of the measured output voltage and FEM showed good agreement and a nearly linear dependence on the applied force on a 3 × 3 µm 2 NW array area in the range of 20 to 90 nN.
Databáze: MEDLINE
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