In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View.

Autor:	Schwarz TM; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Woods E; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Singh MP; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Chen X; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Jung C; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Aota LS; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Jang K; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany.; Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea., Krämer M; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Kim SH; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., McCarroll I; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany., Gault B; Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany.; Department of Materials, Imperial College London, London SW7 2AZ, UK.
Jazyk:	angličtina
Zdroj:	Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada [Microsc Microanal] 2024 Feb 15. Date of Electronic Publication: 2024 Feb 15.
DOI:	10.1093/mam/ozae006
Abstrakt:	Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpened specimen has been proposed to increase yield and reduce background. However, to date, these coatings have been applied ex situ and mostly are not uniform. Here, we report on the controlled focused-ion beam in situ deposition of a thin metal film on specimens immediately after specimen preparation. Different metallic targets e.g. Cr were attached to a micromanipulator via a conventional lift-out method and sputtered using Ga or Xe ions. We showcase the many advantages of coating specimens from metallic to nonmetallic materials. We have identified an increase in data quality and yield, an improvement of the mass resolution, as well as an increase in the effective field-of-view. This wider field-of-view enables visualization of the entire original specimen, allowing to detect the complete surface oxide layer around the specimen. The ease of implementation of the approach makes it very attractive for generalizing its use across a very wide range of atom probe analyses. Competing Interests: Conflict of Interest The authors declare that they have no competing interest. (© The Author(s) 2024. Published by Oxford University Press on behalf of the Microscopy Society of America.)
Databáze:	MEDLINE
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