Correction: Integrated silicon photonic MEMS.

Autor: Quack N; École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.; School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Camperdown, NSW 2006 Australia., Takabayashi AY; École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland., Sattari H; École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.; Swiss Center for Electronics and Microtechnology (CSEM), 2002 Neuchâtel, Switzerland., Edinger P; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden., Jo G; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden., Bleiker SJ; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden., Errando-Herranz C; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden., Gylfason KB; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden., Niklaus F; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden., Khan U; Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium., Verheyen P; imec vzw. 3DSIP Department, Si Photonics Group, Kapeldreef 75, 3001 Leuven, Belgium., Mallik AK; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland., Lee JS; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland., Jezzini M; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland., Zand I; Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium., Morrissey P; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland., Antony C; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland., O'Brien P; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland., Bogaerts W; Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium.
Jazyk: angličtina
Zdroj: Microsystems & nanoengineering [Microsyst Nanoeng] 2024 Jan 24; Vol. 10, pp. 17. Date of Electronic Publication: 2024 Jan 24 (Print Publication: 2024).
DOI: 10.1038/s41378-023-00649-2
Abstrakt: [This corrects the article DOI: 10.1038/s41378-023-00498-z.].
(© The Author(s) 2024.)
Databáze: MEDLINE
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