Assessing the Accuracy of Mass Attenuation Coefficients for Soft X-ray EPMA.
| Autor: | Llovet X; Scientific and Technological Centres, Universitat de Barcelona, Lluís Solé i Sabarís, 1-3, Barcelona 08028, Spain., Pöml P; European Commission, Joint Research Centre, Directorate Nuclear Safety and Security, Karlsruhe 76125, Germany., Moy A; Department of Geoscience, University of Wisconsin, Madison, WI 53706, USA., Fournelle JH; Department of Geoscience, University of Wisconsin, Madison, WI 53706, USA. |
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| Jazyk: | angličtina |
| Zdroj: | Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada [Microsc Microanal] 2023 Apr 05; Vol. 29 (2), pp. 540-551. |
| DOI: | 10.1093/micmic/ozac045 |
| Abstrakt: | The use of soft X-rays in electron probe microanalysis (EPMA) has gained renewed interest over the past decades due to the advent of new detector technologies. Because X-ray absorption is the dominant correction for soft X-rays, a reliable set of mass attenuation coefficients (MACs) is needed for accurate composition determination. Although several MAC tabulations cover the soft X-ray range, the accuracy of such tabulations below 1 keV is not firmly established. In this study, we assess the accuracy of MAC tabulations in the soft X-ray region by comparing tabulated values for Be, B, C, N, O, and F Kα X-rays with experimental data available in the literature. We find that the 1993 semi-empirical MAC compilation of Henke et al. [(1993). Low-energy X-ray interaction coefficients: Photoabsorption, scattering, transmission and reflection at E=50-30000 eV, Z=1-92. Atom Data Nucl Data Tables54, 181-342] and the more recent theoretical MAC calculations of Sabbatucci and Salvat [(2016). Theory and calculation of the atomic photoeffect. Rad Phys Chem121, 122-140] perform slightly better than the rest of the considered tabulations. The Sabbatucci-Salvat dataset also provides the best agreement with the few existing experimental measurements for Al L2,3M X-rays. Competing Interests: Conflict of interest The authors declare that they have no competing interest. (© The Author(s) 2022. Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved. For permissions, please e-mail: journals.permissions@oup.com.) |
| Databáze: | MEDLINE |
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