Autor: |
Asvarov AS; Shubnikov Institute of Crystallography, Federal Scientific Research Center 'Crystallography and Photonics', Russian Academy of Sciences, Leninsky Prospect, 59, 119333 Moscow, Russia., Muslimov AE; Shubnikov Institute of Crystallography, Federal Scientific Research Center 'Crystallography and Photonics', Russian Academy of Sciences, Leninsky Prospect, 59, 119333 Moscow, Russia., Makhmudov SS; Institute of Physics, Dagestan Federal Research Center, Russian Academy Sciences, Yaragskogo Str., 94, 367015 Makhachkala, Russia., Kanevsky VM; Shubnikov Institute of Crystallography, Federal Scientific Research Center 'Crystallography and Photonics', Russian Academy of Sciences, Leninsky Prospect, 59, 119333 Moscow, Russia. |
Abstrakt: |
Porous films of metals and metal oxides have gained growing attention as potential materials for use in applications that require large, specific surface areas, such as sensors, supercapacitors, and batteries. In this study, a "black-metal"-like porous Zn-ZnO composite layer was grown by room temperature co-sputtering of Zn metal and ZnO:Ga (3 at/%) ceramic targets. Following deposition, a porous ZnO layer was obtained by a subsequent thermal annealing process at 400 °C in air. The morphology and structural properties of the obtained porous layered objects were analyzed. The porosity and chemical characteristics of the nanostructured ZnO layer obtained with the method herein described make it suitable to be used as a sensitivity-enhancing active layered element in quartz crystal microbalance (QCM)-based ultraviolet (UV) sensors. The prepared resonant ZnO/QCM sensors under UV radiation exhibited maximum shift up to 35 Hz for several "on-off" UV cycles, excellent response, and recovery times of 11 and 12 s, respectively. |